Development of 3D On-Chip Capacitor Based on High-κ Dielectric
Full paper pdf download The high-κ dielectric materials are commonly used in microelectronic components due to technological necessity of increasing the permittivity of dielectric layers. The thickness of the layer is crucial parameter of this technology because it has significant influence on the dielectric properties, capacitance density, leakage current density-voltage (J-V), and capacitance density-voltage (C-V) characteristics. The paper was presented by Jaromir Hubalek, Brno...