Silicon and Silicon Substrate Based Integrated Capacitors
Silicon MIS and MOS Capacitors Silicon-based dielectrics are used within semiconductor manufacturing processes of high density electronic devices by semiconductor manufacturing processes. Silicon based dielectrics for capacitor technologies are usually based on silicon dioxide (MIS) or silicon nitride (MOS) insulating layers. Figure below describes a conventional MOS technology to make silicon capacitors. SEM image at a 70° tilt after RIE etch. Top shows remaining...